产品介绍
UltroSort(Tropel自动型平坦度检测设备)
价 格：￥价格合理，欢迎洽谈！
型 号：
产品完善度：
生产地：其他访问量：330次
发布日期：2009/11/2 0:00:00
更新日期：1900/1/1 0:00:00
详细内容
Principle/原理:Grazing incidence Interferometer/斜入射干涉
Accuracy/精度:0.05μm/0.05微米
Resolution/解析度:0.01μm/0.1微米
Part Size Configuration/尺寸范围配置:50mm-150mm & 100毫米-200毫米
Dynamic Range/动态测量范围:30μm/30微米
Data Point/数据点:Up to 250,000/达250,000以上
Measurement Time/测量时间:less than 5 seconds/小于五秒（量产设置下）
Throughput Time/量产时间:Clamped measurements 120 Wafer/hour
(每小时可测120片固定住的Wafer)
Measurement Datums/测量数据:Front referenced,Back referenced
Clamped and local site
Measurement Parameters/测量参数:Flatness/Bow/Parallelism
Data Analysis/数据分析:3D,color plot,slice plots,X,Y,circumferential
and radial,histogram plots,percent within plots
Surfaces:Lapped,polished,etched
Accuracy/精度:0.05μm/0.05微米
Resolution/解析度:0.01μm/0.1微米
Part Size Configuration/尺寸范围配置:50mm-150mm & 100毫米-200毫米
Dynamic Range/动态测量范围:30μm/30微米
Data Point/数据点:Up to 250,000/达250,000以上
Measurement Time/测量时间:less than 5 seconds/小于五秒（量产设置下）
Throughput Time/量产时间:Clamped measurements 120 Wafer/hour
(每小时可测120片固定住的Wafer)
Measurement Datums/测量数据:Front referenced,Back referenced
Clamped and local site
Measurement Parameters/测量参数:Flatness/Bow/Parallelism
Data Analysis/数据分析:3D,color plot,slice plots,X,Y,circumferential
and radial,histogram plots,percent within plots
Surfaces:Lapped,polished,etched
