产品介绍
Tropel平坦度检测设备
价 格:¥价格合理,欢迎洽谈!
型 号:FM200
产品完善度:
生产地:其他访问量:406次
发布日期:2009/11/2 0:00:00
更新日期:1900/1/1 0:00:00
详细内容
产品:FlatMaster200 for Wafer/Disk/Industry
Principle/原理:Grazing incidence Interferometer/斜入射干涉
Accuracy/精度:0.1μm/0.1微米
Resolution/解析度:0.01μm/0.1微米
Part Size/尺寸范围:25mm-200mm/25毫米-200毫米
Dynamic Range/动态测量范围:30μm/30微米
Data Point/数据点:Up to 250,000/达250,000以上
Measurement Time/测量时间:〈5s per Measurement/单次测量小于5s
Standard Measurements/标准测量:Flatness/Line profile/Spherical radius
Optional Measurements/可选测量:Angularity/Parallelism/Perpendicularity
Data Analysis/数据分析:3D,topographic,yield,distribution
X,Y,circular and radial slice
Flat,spherical,and conical fit data
Materials/材料:Metals/金属,Ceramics/陶瓷,Polymers/聚合体
Surface/表面:Precision ground,honed,polished and superfinished
Principle/原理:Grazing incidence Interferometer/斜入射干涉
Accuracy/精度:0.1μm/0.1微米
Resolution/解析度:0.01μm/0.1微米
Part Size/尺寸范围:25mm-200mm/25毫米-200毫米
Dynamic Range/动态测量范围:30μm/30微米
Data Point/数据点:Up to 250,000/达250,000以上
Measurement Time/测量时间:〈5s per Measurement/单次测量小于5s
Standard Measurements/标准测量:Flatness/Line profile/Spherical radius
Optional Measurements/可选测量:Angularity/Parallelism/Perpendicularity
Data Analysis/数据分析:3D,topographic,yield,distribution
X,Y,circular and radial slice
Flat,spherical,and conical fit data
Materials/材料:Metals/金属,Ceramics/陶瓷,Polymers/聚合体
Surface/表面:Precision ground,honed,polished and superfinished