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SCI FilmTek TM Systems(薄膜测量仪器测试功能说明)可测量:
Index of Refraction折射指数(at 2μm thickness)
Thickness Measurement Range 厚度测量范围
Maximum Spectral Range 光谱范围
Standard Spectral Range标准光谱范围
Reflection反射测量
Transmission透射测量
Optional Spectroscopic Ellipsometry可选择的光谱椭圆偏光法测量
Power Spectral Density功率谱密度测量
Multi-angle Measurements (DPSD) 多角度测量
Both TE & TM Components of Index
Multi-layer thickness多层厚度测量
Index of Refraction折射系数测量
Extinction (absorption) Coefficient消光(吸收)系数
Energy band gap能量带隙测量
Composition成分测量
Crystallinity晶状测量
Inhomogeneous Layers非均匀层测量
Surface Roughness表面粗糙度测量
A variety of options can extend these standard measurement capabilities.

Typical applications典型应用:
Flat panel display平板显示器薄膜\OLED有机发光二级管薄膜
Semiconductor and dielectric materials半导体和电介质材料薄膜\Computer disks计算机磁盘薄膜
Multilayer optical coatings多层光学涂层薄膜\Coated glass有涂层的玻璃薄膜
Optical antireflection coatings光学抗反射涂层薄膜\aser mirrors激光镜薄膜
Electro-optical materials电镀光学材料薄膜\hin Metals薄金属薄膜

Example Films薄膜范例:
SiOx氧化硅薄膜\a-Si非晶硅薄膜\Alq3
SiNx氮化硅薄膜\a-C:H氧化类金刚石薄膜\HIL
DLC类金刚石薄膜\ITO锡铟氧化物薄膜\BEML
SOG 玻璃上系统薄膜\Polysilicon多晶硅薄膜\GEML
Photoresist光刻胶薄膜\Polyimide聚酰亚胺薄膜\ETL
Thin Metals薄金属薄膜\Color Dye彩色染料薄膜\REML

Example Substrates衬底范例:
Silicon 硅衬底 GaAs砷化镓衬底
SOI衬底 Glass玻璃衬底
SOS衬底 Aluminum铝衬底